구분	장비명	Model 내역	연식	Serial No.	수량
1	AMAT Centura 5200	Centura 5200 Mxp Metal Etcher	1996	9030	1
2	AMAT Etch Chamber	Mxp Etch Chamber	1997	MXP9712	1
		Mxp Etch Chamber	1997	MXP97155	1
3	AMAT P5000 CVD	P5000Mark-2 PECVD	1995	4633	1
4	LAM Poly Etcher	Rainbow 4428 Poly Etcher	1994	20235	1
5	LAM Oxide Etcher	Rainbow 4528 Oxide Etcher	1998	3254	1
		Rainbow 4528 Oxide Etcher	1998	3868	1
6	Nikon Stepper	NSR 1505i6 Stepper	1989	84112	1
7	Oxford Etcher	133 ICP Etcher	1994	94-814948	1
8	TEL Etcher	TE8500 Oxide Etcher	1994	K85109	1
9	Unaxis Etcher	ICP Etcher	2001	UNAXIS P/4508	1
10	Fusion	150 PCU	1994	PU5A126J	1
11	TEL Track	Mark-7 1C2D Track	1995	MD-715571	1
12	Chiller	AMAT-0	1996	2108	1
		AMAT-0	1994	1273	1
		Neslab Chiller	1998	101206004	1
13	Dry Vacuum Pump(11SET)	A30W	2000	C#50725	1
		A30W	2000	C#50848	1
		Kashiyama SD60V	1997	96L3668	1
		Kashiyama SD60V	1998	98A4077	1
		Ulvac HR60	2002	A81A-00028	1
		Ulvac HR60	2002	A81A-00149	1
		Edward IQDP40	1997	37866006	1
		Edward IQDP80	1996	96-2041923	1
		Edward QDP80	1995	46279327	1
		Edward QDP80	1995	46279151	1
		Edward QDP80	1995	46265975	1
14	Scrubber(9SET)	Gas Scrubber Ebara GTE-5-0	1999	K9909221	1
		Gas Scrubber Ebara GTE-5-0	1999	K9910238	1
		Gas Scrubber Ebara GTE-5-0	1999	K9905106	1
		Gas Scrubber Ebara GTE-5-0	1999	K9909220	1
		Gas Scrubber Toshiba	2000	6587	1
		Gas Scrubber Toshiba	2000	6588	1
		Gas Scrubber Ebara GTE-1-0	1998	K9801040	1
		Gas Scrubber Ebara GTE-1-0	1998	K9801041	1
		Gas Scrubber Hitachi CD-60	2000	A1L0000291	1
15	Microscope(10SET)	Olympus BH2-UMA Microscope	2000	3J0317	1
		Olympus BH2-UMA Microscope	2000	3J0336	1
		Olympus BH2-UMA Microscope	2001	700002	1
		Olympus BH2-UMA Microscope	2001	7E0002	1
		Olympus BHC-MJL Microscope	2003	4D0009	1
		Olympus STM-UM Microscope	2004	412001	1
		Nikon Microscope Plan X4, X10, X20, X40	1998	232720	1
		Nikon Microscope M Plan X10, X40, X100	1997	218134	1
		Nikon UFX Microscope	1997	223717	1
		Nikon UFX-DX Microscope	1998	141718	1

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